RWMAP 晶园检测系统
制造厂商： 意大利 Astel
The complete microscope inspection system for wafers with full map management
Specifications：
Three axes, motorized microscope stage. X,Y and R, resolution 1μ and <0.01°
PC based motion controller
High resolution cameras
24″ high resolution monitor
Inspection modes: single die direct access, sequential scan, free, statistical sampling, programmed paths
Complete bin code management
Map type according to SEMI standard, custom formats on request
Map download/upload through TCP/IP
Autofocus for motorized Z axis microscopes
On screen measurement functions
Optional ID reader OCR reader with LED illuminator
Optional SECS-II HSMS and GEM interfacing
